Electrical Properties of Molybdenum Metal Deposited by Plasma Enhanced – Atomic Layer Deposition of Variation Condition
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Korean Journal of Materials Research
سال: 2019
ISSN: 1225-0562,2287-7258
DOI: 10.3740/mrsk.2019.29.11.715